DSA process window expansion with novel DSA track hardware

Harumoto, M; Stokes, H; Tanaka, Y; Kaneyama, K; Pieczulewski, C; Asai, M; Argoud, M; Servin, I; Chamiot-Maitral, G; Claveau, G; Tiron, R; Cayrefourcq, I

Harumoto, M (reprint author), SCREEN Semicond Solut Co Ltd, 480-1 Takamiya Cho, Hikone, Shiga 5220292, Japan.

ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIV, 2017; 10146 ( ):

Abstract

PS-b-PMMA block copolymer is a well-known DSA material, and there are many DSA patterning methods that make effective use of such 1st generation mater......

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